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Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma
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10.1063/1.3261752
/content/aip/journal/apl/95/19/10.1063/1.3261752
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/19/10.1063/1.3261752
/content/aip/journal/apl/95/19/10.1063/1.3261752
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/content/aip/journal/apl/95/19/10.1063/1.3261752
2009-11-13
2014-12-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effect of the resonant growth of harmonics on the electron density in capacitively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/19/10.1063/1.3261752
10.1063/1.3261752
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