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Images of the nanoimprinted grating optical tunable filter (GOTF) device. (a) SEM image of the entire device consigning of a long, wide, thick PDMS grating microbridge with 700 nm nominal pitch, and MEMS silicon comb drive electrostatic actuators. (b) Optical image of 16 device arrays on a die area. (c) Optical image of the whole device unit.
Device operation and characterization. (a) Working principle of the GOTF device. The period of the grating changes from to when subjected to mechanical strain. The wavelength of the first order diffraction at the same diffraction angle shifts from to . The wavelength shift of the first order diffraction at the angle is tuned by the actuation voltage applied to the comb drives. (b) Experimental setups incorporating the GOTF for (1) dynamic optical switching bandwidth measurement, (2) excitation spectrum measurement, and (3) live/dead PC3 cell two-color imaging.
Results for high-speed ALEX using the GOTF device. (a) Sinusoidal actuation voltage applied to the comb drives of the GOTF device. (b) Grating strain. (c) PMT signal.
Results for two-color live/dead PC3 cell imaging. (a) Excitation spectrum as a function of the actuation voltage applied to the GOTF device. [(b)–(g)] Sequence of images corresponding to the excitation spectrum in (a). The emission intensities are measured for the areas marked with a square frame.
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