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Interaction of capping layers with gate dielectrics
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10.1063/1.3268456
/content/aip/journal/apl/95/21/10.1063/1.3268456
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/21/10.1063/1.3268456
/content/aip/journal/apl/95/21/10.1063/1.3268456
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/content/aip/journal/apl/95/21/10.1063/1.3268456
2009-11-24
2014-09-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interaction of La2O3 capping layers with HfO2 gate dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/21/10.1063/1.3268456
10.1063/1.3268456
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