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Relationship between transition layer thickness and mobility
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10.1063/1.3144272
/content/aip/journal/apl/95/3/10.1063/1.3144272
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/3/10.1063/1.3144272

Figures

Image of FIG. 1.
FIG. 1.

(a) Z-contrast image and (b) the corresponding intensity profile from sample B, indicating a transition region of the reduced intensity on the SiC side of the interface.

Image of FIG. 2.
FIG. 2.

Peak effective channel mobility vs width of the transition layer as measured using the Z-contrast image intensity profiles.

Image of FIG. 3.
FIG. 3.

Z-contrast image from sample B and the corresponding and atomic ratios calculated from the EELS spectra corresponding to the interface region, indicating a transition region with a higher concentration of carbon than silicon.

Tables

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Table I.

Description of the devices analyzed in this study.

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Table II.

Summary of peak mobility and transition region width for each of the samples.

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/content/aip/journal/apl/95/3/10.1063/1.3144272
2009-07-22
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Relationship between 4H-SiC∕SiO2 transition layer thickness and mobility
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/3/10.1063/1.3144272
10.1063/1.3144272
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