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[(a) and (b)] Double nanobeam cavity, showing the separation and cavity length . (c) Mode wavelength and quality factor for different nanobeam separations. The resonant scattering spectrum for the 150 nm double cavity is shown in the inset.
(a) factors of even and odd coupled nanobeam modes. Insets show components of the modes. (b) Mode wavelengths as a function of separation, showing large dispersion of the even mode.
Wavelength and factor as a function of measured separation for on substrate [(a) and (b)] and freestanding [(c) and (d)] double nanobeam cavities. The insets show typical spectra normalized by reference spectra taken away from the cavity. The simulations in [(a) and (b)] do not include the residual FOx resist layer, which has a negligible effect on the factor and shifts the wavelength by only a few nanometers.
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