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Nomarski microscope images of damage by 13.5 nm beam at normal incidence (left) and 18.5° grazing angle (right). The scale is the same for both images.
Diameter of damage corresponding to graphitization as a function of the impinging laser pulse energy. Both curves correspond to the normal incidence case. The curves represent fits used to determine .
Threshold fluence for damage as a function of grazing angle. The curves show the ratio , normalized with a constant in order to scale the experimental data. The value of is indicated on the top for both wavelengths.
Absorbed dose as a function of absorption depth.
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