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Laser wavelength effects in ultrafast near-field laser nanostructuring of Si
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10.1063/1.3193537
/content/aip/journal/apl/95/4/10.1063/1.3193537
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/4/10.1063/1.3193537
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) AFM surface map of a near-field laser processed Si surface using the 400 nm, 100 fs laser source. Here each row represents regions processed with a fixed number of pulses in the range of 5 to 500, at laser energy of 0.23 nJ . The red line defines a regime in the laser pulses number above which craters are transformed to protrusions. Line profiles for (b) 500 pulses and (c) 10 pulses. (d) Dependence of lateral feature size, FWHM and height or depth of the structures on the number of laser pulses for an energy of 0.18 nJ . The dashed lines here are guides for the eye. (e) AFM image of lines formed at an energy of 0.23 nJ .

Image of FIG. 2.
FIG. 2.

(a) AFM surface map of a near-field laser processed Si surface using the 800 nm, 100 fs laser source. Here each row represents regions processed with a fixed number of pulses in the range of 5 to 500, at laser energy of 1.90 nJ . Line profiles for (b) 500 pulses and (c) 10 pulses. (d) Lateral feature size, FWHM and height of the protrusions of the structures as a function of the number of laser pulses used, for the same energy. The dashed lines here are guides for the eye. (e) AFM image of lines formed by scanning the sample with respect to the laser beam.

Image of FIG. 3.
FIG. 3.

(a) The smallest structures obtained using 400 nm femtosecond irradiation. The crater was fabricated with single pulse irradiation at 0.18 nJ . The FWHM size is 27 nm, the diameter is 55 nm with a height of 1.2 nm. The inset shows a crater created with single pulse irradiation for higher energy (0.32 nJ or ). (b) Some of the smallest structures obtained using 800 nm femtosecond irradiation (30 pulses at 1.27 nJ or ). The FWHM size is 69 nm, the diameter is 142 nm with a height of 1.5 nm. The inset shows structures created using 5 pulses at 1.90 nJ .

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/content/aip/journal/apl/95/4/10.1063/1.3193537
2009-07-29
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Laser wavelength effects in ultrafast near-field laser nanostructuring of Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/4/10.1063/1.3193537
10.1063/1.3193537
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