Full text loading...
XRD and ATR-FTIR spectra of crystalline 10 nm HfZrO films with various compositions. The inset shows the volume fraction of monoclinic phase in dependence of content, as extracted from the XRD measurement.
ATR-FTIR measurements of bilayer stacks with a total thickness of 8 nm and fractional layer thickness as indicated in the diagram. (a) The topmost layer is . (b) The topmost layer is .
Dependence of the dielectric constant of HfZrO on content for a film thickness of 8 nm. The fraction is either uniformly distributed or concentrated at the top or bottom of the stack.
Gibbs free energy difference between the monoclinic and tetragonal phase for and with different surface free energies.
Bulk parameters and critical thickness used for the thermodynamic model.
Article metrics loading...