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AFM image of AlN layers grown in optimized conditions: (a) thick area and (b) thick area.
(a) AFM image of sample A before etching, (b) AFM image of the same sample after etching in KOH, and (c) AFM image of sample B without IDs.
characteristic and photograph of MSM PDs.
Spectral response of MSM PD at bias.
XRD results for two thick AlN samples used for MSM PDs.
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