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Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements
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10.1063/1.3202418
/content/aip/journal/apl/95/5/10.1063/1.3202418
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/5/10.1063/1.3202418
/content/aip/journal/apl/95/5/10.1063/1.3202418
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/content/aip/journal/apl/95/5/10.1063/1.3202418
2009-08-07
2014-09-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/5/10.1063/1.3202418
10.1063/1.3202418
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