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Random and aligned spectra (circles and squares) and simulation (solid line) from RBS/C experiments at 2 MeV. The insets show the aligned spectrum in detail. Windows of the film and the substrate signals for the angular scans are also shown.
Experimental angular scans across the axis for different energies in strained AlGaInN/GaN (a) and AlInN/GaN (b) HSs. As a reference, the angular scan from the active layer at 2 MeV is shown (top graphics). The horizontal lines mark the value of the real kink angle for both HSs. The shift from the substrate does not match due to steering effects, which gradually diminish with energy.
Experimental angular shifts and MC predictions for the HSs analyzed as a function of the probing energy.
In-plane and out-of-plane lattice parameters from RSMs and derived values for tetragonal distortion and kink angle .
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