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Thermoelastic damping in micromechanical resonators
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10.1063/1.3190509
/content/aip/journal/apl/95/6/10.1063/1.3190509
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/6/10.1063/1.3190509
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

FEM calculations of 1–1 (a) and 2–0 (b) modes. Gray levels show relative displacement. Outer ends of attachment arms are fixed in FEM calculation.

Image of FIG. 2.
FIG. 2.

(a) vs temperature for the 1–1 mode (solid circles, post-bakeout; open circles, post-1170 K anneal), together with earlier measurements on identical resonators, post-anneal (open triangles) (Ref. 13). (b) vs temperature for 1–1 (open circles) and 2–0 (solid diamonds) modes, post-anneal, together with [from Eq. (2)] to which a temperature-independent offset has been added to account for temperature-independent energy loss mechanisms (1–1 mode, dashed line; 2–0 mode, dotted line).

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/content/aip/journal/apl/95/6/10.1063/1.3190509
2009-08-10
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermoelastic damping in micromechanical resonators
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/6/10.1063/1.3190509
10.1063/1.3190509
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