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Quasi-single-crystal (001) templates on Si
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10.1063/1.3202398
/content/aip/journal/apl/95/6/10.1063/1.3202398
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/6/10.1063/1.3202398
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Out-of-plane (002) STO rocking curves and (b) in-plane (101) STO phi scans of 100 nm thick STO templates on Si substrates before/after annealing at for 2 h.

Image of FIG. 2.
FIG. 2.

AFM images of [(a) and (c)] as-grown and [(b) and (d)] annealed 100 nm thick STO templates on Si substrates. [(a) and (b)] before and [(c) and (d)] after BHF treatment for 40 s. Scan size is .

Image of FIG. 3.
FIG. 3.

(a) Out-of-plane (220) SRO rocking curves and (b) in-plane (112) SRO phi scans of 50 nm thick epitaxial SRO films grown on as-grown and annealed STO/Si templates by sputtering.

Image of FIG. 4.
FIG. 4.

AFM images of 50 nm thick epitaxial SRO films grown on (a) as-grown and (b) annealed STO/Si templates by sputtering. Scan size is .

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/content/aip/journal/apl/95/6/10.1063/1.3202398
2009-08-10
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Quasi-single-crystal (001) SrTiO3 templates on Si
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/6/10.1063/1.3202398
10.1063/1.3202398
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