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(a) Schematic of the patterning process. (b) Optical microscopic image of the film surface taken after patterning.
Optical profiler images of patterned Al films along with a height profile.
Scanning electron microscopic image of a Ag film patterned by two-beam interference and a schematic of the patterning setup.
Characteristics of a ZTO TFT with photoetched Al source and drain electrodes. voltage, voltage, and current.
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