1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Study on the formation of dodecagonal pyramid on nitrogen polar GaN surface etched by hot
Rent:
Rent this article for
USD
10.1063/1.3211970
/content/aip/journal/apl/95/7/10.1063/1.3211970
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/7/10.1063/1.3211970
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

SEM images tilted with 30° of LLO N-polar GaN surface etched with hot at for (a) 10 min and (b) 20 min.

Image of FIG. 2.
FIG. 2.

(a) Dependences of density and base size of the dodecagonal pyramids formed on N-polar GaN on the etching temperature for 5 min. (b) The Arrhenius plot of pyramid density versus inversely of .

Image of FIG. 3.
FIG. 3.

SEM images of LLO N-polar GaN surface etched with hot at for 5 min taken (a) from the top and (b) tilted with 30° angle.

Image of FIG. 4.
FIG. 4.

Schematic drawing of the formation process of a pyramid. The oblique angle of the facets is determined by the ratio of normal etch rate and tangent etch rate .

Image of FIG. 5.
FIG. 5.

(a) Calculation result of LEF of LEDs as a function of the pyramids density. Inset of (a) shows the schematics of the LED model used in the ray-tracing simulation. [(b)–(d)] SEM images of rough surface of VTF LEDs etched by hot at for 2, 5, and 10 min, respectively. (e) Experimental curves of the nonetched and etched samples.

Loading

Article metrics loading...

/content/aip/journal/apl/95/7/10.1063/1.3211970
2009-08-21
2014-04-17
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Study on the formation of dodecagonal pyramid on nitrogen polar GaN surface etched by hot H3PO4
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/7/10.1063/1.3211970
10.1063/1.3211970
SEARCH_EXPAND_ITEM