Full text loading...
XRR (filled circles) together with best fits to the data (solid lines) for superlattices A–D. Data are shown for both as-deposited samples and after spike annealing. Curves for spike-annealed samples are offset for clarity.
GIXRD data of spike-annealed (a) superlattice samples A–D and (b) films with Hf contents as specified. The data are offset for clarity. Peak positions and indices are indicated for the monoclinic (m) and cubic (c) phases.
IS-XRD patterns of samples A–C during ramp annealing. The onset temperatures of crystallization are indicated by dotted lines. Peak indices corresponding to monoclinic (m) and cubic (c) phases are also indicated.
List of samples used in the study. Individual layer thickness , density , and interface roughness corresponding to best superlattice models for the XRR data are given. Parameters are listed for both as-deposited and spike-annealed structures when superlattice models were applicable.
Article metrics loading...