1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Interdiffusion and crystallization in superlattices
Rent:
Rent this article for
USD
10.1063/1.3223616
/content/aip/journal/apl/95/9/10.1063/1.3223616
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/9/10.1063/1.3223616

Figures

Image of FIG. 1.
FIG. 1.

XRR (filled circles) together with best fits to the data (solid lines) for superlattices A–D. Data are shown for both as-deposited samples and after spike annealing. Curves for spike-annealed samples are offset for clarity.

Image of FIG. 2.
FIG. 2.

GIXRD data of spike-annealed (a) superlattice samples A–D and (b) films with Hf contents as specified. The data are offset for clarity. Peak positions and indices are indicated for the monoclinic (m) and cubic (c) phases.

Image of FIG. 3.
FIG. 3.

IS-XRD patterns of samples A–C during ramp annealing. The onset temperatures of crystallization are indicated by dotted lines. Peak indices corresponding to monoclinic (m) and cubic (c) phases are also indicated.

Tables

Generic image for table
Table I.

List of samples used in the study. Individual layer thickness , density , and interface roughness corresponding to best superlattice models for the XRR data are given. Parameters are listed for both as-deposited and spike-annealed structures when superlattice models were applicable.

Loading

Article metrics loading...

/content/aip/journal/apl/95/9/10.1063/1.3223616
2009-09-03
2014-04-21
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Interdiffusion and crystallization in HfO2/Al2O3 superlattices
http://aip.metastore.ingenta.com/content/aip/journal/apl/95/9/10.1063/1.3223616
10.1063/1.3223616
SEARCH_EXPAND_ITEM