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High-Q conical polymeric microcavities
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/content/aip/journal/apl/96/1/10.1063/1.3280044
2010-01-04
2014-08-22

Abstract

We report on the fabrication of high-Q microresonators made of low-loss, thermoplastic polymer poly(methyl methacrylate) (PMMA) directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical geometry with an ultrasmooth surface. The cavity Q factor of these PMMA resonators is above in the 1300 nm wavelength range. Finite element simulations show the existence of a variety of “whispering gallery” modes in these resonators explaining the complexity of the measured transmission spectra.

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Scitation: High-Q conical polymeric microcavities
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/1/10.1063/1.3280044
10.1063/1.3280044
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