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Influence of density on bond stretch vibration in plasma enhanced chemical vapor deposited
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View: Figures


Image of FIG. 1.
FIG. 1.

with back-bonds terminated with hydrogen (black atoms). The hydrogen bridge is indicated by the dotted line.

Image of FIG. 2.
FIG. 2.

Scaled IR absorption spectrum of the stretch vibration in with different stress and density deposited at similar conditions with pressures varied between 2.0–8.5 Torr. Low pressure gives a high density, resulting in a more pronounced asymmetrical tail which is characterized by the width at half and quarter peak height as is shown here for the nitride (solid line). The shift of the peak position is relative to the maximum calculated .

Image of FIG. 3.
FIG. 3.

Dependency of on and estimated average distance between N atoms for different deposited layers before (closed symbols) and after anneal (open symbols). also decreases with when increasing the Si/N ratio by increasing flow (star symbols).

Image of FIG. 4.
FIG. 4.

Fit through the calculated of the cluster (black spheres) as function of the distance between the two N atoms and the average bond angles of .


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of density on NH bond stretch vibration in plasma enhanced chemical vapor deposited SiNx:H