1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Strain evolution during the silicidation of nanometer-scale SiGe semiconductor devices studied by dark field electron holography
Rent:
Rent this article for
USD
10.1063/1.3358149
/content/aip/journal/apl/96/11/10.1063/1.3358149
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3358149

Figures

Image of FIG. 1.
FIG. 1.

shows (a) a bright-field TEM image, (b) a dark field electron hologram for the {220} diffraction spot, (c) a strain map for the {220} direction and (d) profiles extracted from the indicated region in the strain map for a SiGe device with a Ge content of 35%. (e), (f), (g), and (h) are as above except for a SiGe specimen with a Ge content of 23%.

Image of FIG. 2.
FIG. 2.

(a), (b), and (c) show a bright-field TEM image, a {220} strain map, and profiles extracted from the region indicated by the dashed line in (b) for the SiGe device with a Ge content of 35%. (d), (e), and (f) are as above except after a anneal. (g), (h), and (i) correspond to the specimen after a anneal.

Tables

Generic image for table
Table I.

Table showing the strain measured directly under the conduction channel for the SiGe devices with different Ge contents after different stages during the silicidation process. In all cases the experimental error is estimated to be ±0.1%.

Loading

Article metrics loading...

/content/aip/journal/apl/96/11/10.1063/1.3358149
2010-03-16
2014-04-16
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Strain evolution during the silicidation of nanometer-scale SiGe semiconductor devices studied by dark field electron holography
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3358149
10.1063/1.3358149
SEARCH_EXPAND_ITEM