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Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines
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10.1063/1.3360888
/content/aip/journal/apl/96/11/10.1063/1.3360888
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3360888
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A pair of optical transitions from the upper state to the short-lived and long-lived in Ar considered in this study.

Image of FIG. 2.
FIG. 2.

Abel-inversed 2D emission intensity of and at . The derived metastable density of is also shown for comparison. 2f-CCP is driven at VHF (100 Mz, 50 W) and biased at LF (500 kHz, 400V) in Ar at 100 mTorr and 50 SCCM.

Image of FIG. 3.
FIG. 3.

Abel-inversed 2D distribution of the number density of long-lived, metastable (a) and that of short-lived (b), observed from the OES of a pair of transitions. The external plasma condition is the same as that in Fig. 1.

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/content/aip/journal/apl/96/11/10.1063/1.3360888
2010-03-15
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Spatial distribution of nonemissive metastables in a two-frequency capacitively coupled plasma in Ar by using a pair of optical emission lines
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3360888
10.1063/1.3360888
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