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Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets
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10.1063/1.3364141
/content/aip/journal/apl/96/11/10.1063/1.3364141
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3364141
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

The estimated in-band CE from laser-produced Sn plasma by repetitively hitting the laser at the same spot.

Image of FIG. 2.
FIG. 2.

The CE obtained from a wide, deep grooved target. The spot size used in the measurement was . Inset shows the schematic of the channel target (x and y are the width and depth of the channel target).

Image of FIG. 3.
FIG. 3.

The EUV images obtained from planar and groove targets (a). The images are given in logarithmic scale for better clarity. Intensity counters obtained from EUV images are given in (b).

Image of FIG. 4.
FIG. 4.

The estimated density distribution HEIGHTS 15 ns after the peak of the laser pulse (a) and at the end of the laser pulse (b) are given.

Image of FIG. 5.
FIG. 5.

The estimated in-band EUV photon distribution using HEIGHTS 15 ns after the peak of the laser pulse (a) and at the end of the laser pulse (b) are given.

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/content/aip/journal/apl/96/11/10.1063/1.3364141
2010-03-16
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Efficient laser-produced plasma extreme ultraviolet sources using grooved Sn targets
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/11/10.1063/1.3364141
10.1063/1.3364141
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