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C-V characteristics for the MIM capacitors with Ni or Al top electrode measured at 1 MHz and room temperature. The inset shows the as a function of voltage for these two types of capacitors.
vs stress time for different top electrodes measured at room temperature with stress voltage between −2 and −3 V.
Dependence of extrapolated for ten-year lifetime on stress voltage for different top electrodes. The inset is the comparison of characteristics for the MIM capacitors with different top electrodes measured at 25 and where T and E are temperature and electric field, respectively.
Bidirectional J-V characteristics measured between ±3 V voltage sweeping for the MIM capacitors with different top electrodes. The inset shows the J-V characteristics for the Al-electrode MIM capacitors measured at fixed voltage step of 0.1 V with time delay as a variable.
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