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Impact of top electrode on electrical stress reliability of metal-insulator-metal capacitor with amorphous film
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10.1063/1.3377914
/content/aip/journal/apl/96/13/10.1063/1.3377914
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/13/10.1063/1.3377914
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

C-V characteristics for the MIM capacitors with Ni or Al top electrode measured at 1 MHz and room temperature. The inset shows the as a function of voltage for these two types of capacitors.

Image of FIG. 2.
FIG. 2.

vs stress time for different top electrodes measured at room temperature with stress voltage between −2 and −3 V.

Image of FIG. 3.
FIG. 3.

Dependence of extrapolated for ten-year lifetime on stress voltage for different top electrodes. The inset is the comparison of characteristics for the MIM capacitors with different top electrodes measured at 25 and where T and E are temperature and electric field, respectively.

Image of FIG. 4.
FIG. 4.

Bidirectional J-V characteristics measured between ±3 V voltage sweeping for the MIM capacitors with different top electrodes. The inset shows the J-V characteristics for the Al-electrode MIM capacitors measured at fixed voltage step of 0.1 V with time delay as a variable.

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/content/aip/journal/apl/96/13/10.1063/1.3377914
2010-03-30
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of top electrode on electrical stress reliability of metal-insulator-metal capacitor with amorphous ZrTiO4 film
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/13/10.1063/1.3377914
10.1063/1.3377914
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