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XRD spectra of a-HIZO films as-deposited and annealed depending on oxygen ratios.
XPS results of a-HIZO film after thermal annealing. The data shows the peak position of (a) and , (b) , (c) , and (d) .
(a) Transfer curves of postannealed a-HIZO TFTs before and after BS for 60 h. (b) Time dependence of variation in for postannealed a-HIZO TFT due to applied on-current BS for 60 h.
Shift in for annealed a-HIZO TFT after BTS test for 18 h.
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