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Dynamic smoothing of nanocomposite films
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10.1063/1.3394019
/content/aip/journal/apl/96/15/10.1063/1.3394019
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/15/10.1063/1.3394019
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Time dependence of the interface roughness of TiC/a-C films: (a) the influence of the noise strength and (b) the effect of the diffusion coefficient responsible for the downhill flow of adatoms induced by the concurrent ions impingement. The model curves are found from the solution of Eqs. (1)–(3). The black curve of round symbols is the experimental result.

Image of FIG. 2.
FIG. 2.

Numerically simulated interface profiles vs deposition time , with the interfaces roughness indicated: (a) profiles simulated with the basic set of parameters to fit the experimental result plotted in Fig. 1; (b) with high deposition noise; (c) with no diffusion; (d) with high value of diffusivity; (e) with no diffusion, and (f) with high value of diffusivity. For clarity, each profile is shifted along z-axis by 2 nm.

Image of FIG. 3.
FIG. 3.

Cross-sectional HRTEM micrograph of the film revealing that an amorphous front layer of about 2 nm thickness covers the bulk nanocomposite film. The inset is an overview of the growing interface.

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/content/aip/journal/apl/96/15/10.1063/1.3394019
2010-04-14
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamic smoothing of nanocomposite films
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/15/10.1063/1.3394019
10.1063/1.3394019
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