1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Depth-dependence of electrical conductivity of diamondlike carbon films
Rent:
Rent this article for
USD
10.1063/1.3407671
/content/aip/journal/apl/96/16/10.1063/1.3407671
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/16/10.1063/1.3407671
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Resistance vs temperature of a fs a-C before and after RIE etching of 50 nm on top of the film. The inset is giving the geometry of the sample, the contact to the electrical leads are underneath the DLC films.

Image of FIG. 2.
FIG. 2.

Electrical resistivity plotted vs temperature for the fs and ns a-C films before and after RIE.

Image of FIG. 3.
FIG. 3.

Topological and electrical characterizations of the surface of the fs a-C films before RIE (a) and after RIE (b) by scans of , the color scale bar indicates the value of the resistance measured by the C-AFM. In (c), we give the repartition of resistance in percentage as a function of log(r), the blue curve corresponds to (a) and the red one to (b).

Loading

Article metrics loading...

/content/aip/journal/apl/96/16/10.1063/1.3407671
2010-04-23
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Depth-dependence of electrical conductivity of diamondlike carbon films
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/16/10.1063/1.3407671
10.1063/1.3407671
SEARCH_EXPAND_ITEM