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Schematic of a parallel-plate electrostatic actuator in a conductive dielectric medium. , .
Displacement vs applied potential for and selected values of . (a) Wide range showing curve shape transition. (b) Stability limit region showing stable range of actuator after pull-in and before pull-out. Arrows show actuator paths assuming no structural limitations (e.g., dimples).
Frequency response of and . At , and curves terminate.
Parallel-plate electrostatic actuator stability diagram in conductive fluids. Five distinct regions: (i) Fully unstable (unstable for all ), (ii) partial pull-in instability (stable range exists after pull-in), (iii) partial pull-out instability (stable range exists before pull-out), (iv) stable because does not exist, i.e., no roots of , and (v) stable because . The inset shows the minimum voltage required to actuate a device to and 0.2 without instability (Ref. 13).
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