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Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids
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10.1063/1.3389491
/content/aip/journal/apl/96/20/10.1063/1.3389491
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3389491
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic of a parallel-plate electrostatic actuator in a conductive dielectric medium. , .

Image of FIG. 2.
FIG. 2.

Displacement vs applied potential for and selected values of . (a) Wide range showing curve shape transition. (b) Stability limit region showing stable range of actuator after pull-in and before pull-out. Arrows show actuator paths assuming no structural limitations (e.g., dimples).

Image of FIG. 3.
FIG. 3.

Frequency response of and . At , and curves terminate.

Image of FIG. 4.
FIG. 4.

Parallel-plate electrostatic actuator stability diagram in conductive fluids. Five distinct regions: (i) Fully unstable (unstable for all ), (ii) partial pull-in instability (stable range exists after pull-in), (iii) partial pull-out instability (stable range exists before pull-out), (iv) stable because does not exist, i.e., no roots of , and (v) stable because . The inset shows the minimum voltage required to actuate a device to and 0.2 without instability (Ref. 13).

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/content/aip/journal/apl/96/20/10.1063/1.3389491
2010-05-19
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3389491
10.1063/1.3389491
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