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Strain induced suppression of silver agglomeration of indium-containing silver contact
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10.1063/1.3430509
/content/aip/journal/apl/96/20/10.1063/1.3430509
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3430509

Figures

Image of FIG. 1.
FIG. 1.

(a) Light reflectance spectra of Ag, Ag(0.5 wt % In), Ag(1 wt % In), and Ag(5 wt % In) contacts after annealing at . (b) Change in ratios for Ag and Ag(In) contacts with annealing time at in air ambient.

Image of FIG. 2.
FIG. 2.

(a) SIMS depth profiles of Ag(0.5 wt % In) contact (a) before and (b) after annealing at under air ambient. (c) HAADF image and EDS composition mappings of (d) In and (e) O of Ag(0.5 wt % In) contact annealed at .

Image of FIG. 3.
FIG. 3.

SEM micrographs of (a) Ag contact annealed at , (b) Ag(0.5 wt % In), (c) Ag(3 wt % In), and (d) Ag(5 wt % In) contact annealed at .

Image of FIG. 4.
FIG. 4.

(a) XRD profiles for Ag and Ag(5 wt % In) contacts, (b) Lattice constant change in Ag and Ag(In) contacts as a function of annealing temperature.

Image of FIG. 5.
FIG. 5.

Off-axis phi scans of the Ag and Ag(0.5 wt % In) contacts for the GaN (102) and Ag (200) reflections before and after annealing. Both Ag and Ag(0.5 wt % In) contact are annealed at 300 and for 1 min in air ambient, respectively.

Tables

Generic image for table
Table I.

Changes in contact resistivity for Ag and Ag–In alloy contacts as a function of annealing temperature.

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/content/aip/journal/apl/96/20/10.1063/1.3430509
2010-05-19
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Strain induced suppression of silver agglomeration of indium-containing silver contact
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3430509
10.1063/1.3430509
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