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Removal of near-interface traps at (0001) interfaces by phosphorus incorporation
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10.1063/1.3432404
/content/aip/journal/apl/96/20/10.1063/1.3432404
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3432404
/content/aip/journal/apl/96/20/10.1063/1.3432404
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/content/aip/journal/apl/96/20/10.1063/1.3432404
2010-05-21
2014-10-30
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Removal of near-interface traps at SiO2/4H–SiC (0001) interfaces by phosphorus incorporation
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/20/10.1063/1.3432404
10.1063/1.3432404
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