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Schematic diagrams of (a) a MIS capacitor and (b) a MIM capacitor.
XRD scan of the heterostructure composed of grown on a (001) substrate. Inset shows an XRD -scan on 222 reflection of the layer.
(a) Measured curves of the MIS capacitor and the MIM capacitor with an equivalent circuit. (b) plot of the MIS capacitor for positive voltages. The slope of the plot indicates a carrier concentration of .
Calculated curves of the MIS capacitor with different in . When , the calculated curve shows good agreement with the measurement, consistent with the estimation in Fig. 3(b).
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