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Tunable thin film bulk acoustic wave resonators with improved -factor
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10.1063/1.3441413
/content/aip/journal/apl/96/21/10.1063/1.3441413
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/21/10.1063/1.3441413
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Three-dimensional schematic image of a TFBAR test structure.

Image of FIG. 2.
FIG. 2.

Measured and de-embedded -factors vs electrode area at 25 V dc bias. The lines are polynomial curve fit.

Image of FIG. 3.
FIG. 3.

Series resonance frequency and de-embedded -factor of a TFBAR vs dc bias voltage. The lines are polynomial curve fit.

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/content/aip/journal/apl/96/21/10.1063/1.3441413
2010-05-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tunable thin film bulk acoustic wave resonators with improved Q-factor
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/21/10.1063/1.3441413
10.1063/1.3441413
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