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(a) The schematic diagram of a-IGZO TFT on the structure of /parylene-C/PES substrate. Parylene-C is used to protect PES substrate from organic solvents and acids. Also, is used as the adhesive layer. (b) Deposition process of parylene-C.
(a) SEM image and (b) AFM image of the surface of parylene-C on the PES substrate. The surface roughness of the parylene-C is confirmed to be about 2 nm by AFM.
(a) SEM image of patterned electrode fabricated on the parylene-C/PES substrate (inset: it is observed that electrode is detached via the hydrophobic property of parylene-C). (b) SEM image of line patterns fabricated on the /parylene-C/PES substrate.
(a) Output characteristics and (b) transfer characteristics of a-IGZO TFT fabricated on the /parylene-C/PES substrate. Device is annealed at .
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