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Arsenic decapping and half cycle reactions during atomic layer deposition of on
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10.1063/1.3452336
/content/aip/journal/apl/96/25/10.1063/1.3452336
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/25/10.1063/1.3452336
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/content/aip/journal/apl/96/25/10.1063/1.3452336
2010-06-24
2014-08-22
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Arsenic decapping and half cycle reactions during atomic layer deposition of Al2O3 on In0.53Ga0.47As(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/25/10.1063/1.3452336
10.1063/1.3452336
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