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Adiabatic embedment of nanomechanical resonators in photonic microring cavities
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) Optical microscope image of the radius ring resonator with inset showing the cross-sectional schematic of the horizontal slot waveguide structure with 80 nm slot. (b) The long amorphous silicon beam released from the substrate as observed in the SEM. The buckling is a result of residual compressive stress. (c) Optical transmission spectra before and after the releasing process. Inset shows the fitted factors for a cavity resonance around 1540 nm wavelength, before and after the release.

Image of FIG. 2.
FIG. 2.

(a) A high resolution AFM image of the released beam showing buckling of 450 nm with the contour of the nanomechanical beam outlined. (b) Simulated fundamental optical mode profile along three cut locations as labeled in panel (a). (c) FDTD simulations of the propagation loss along the buckled beam vs the buckling amplitude as a function of the waveguide width. The inset shows the FEM simulation of the fundamental out-of-the-plane mechanical mode shape of the beam with the stress distribution displayed in color.

Image of FIG. 3.
FIG. 3.

(a) Thermomechanical noise spectrum density and calibrated displacement sensitivity. Measurement was taken in a vacuum of 1 mTorr. (b) The frequency response of the beam resonances at various driving amplitude. The left inset shows the phase response at 0.4 mW actuation power.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Adiabatic embedment of nanomechanical resonators in photonic microring cavities