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A schematic diagram of an inductively coupled plasma.
(a) Radial profiles of the effective electron temperature and (b) their spatial resolved EEPFs at 2 mTorr and 200 W.
(a) Radial profiles of the measured effective electron temperature with increasing argon pressure at 200 W and (b) calculated electron energy relaxation length in elastic range.
The EEPF evolution with argon pressures at 200 W.
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