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Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
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10.1063/1.3291038
/content/aip/journal/apl/96/4/10.1063/1.3291038
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/4/10.1063/1.3291038
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

A schematic diagram of an inductively coupled plasma.

Image of FIG. 2.
FIG. 2.

(a) Radial profiles of the effective electron temperature and (b) their spatial resolved EEPFs at 2 mTorr and 200 W.

Image of FIG. 3.
FIG. 3.

(a) Radial profiles of the measured effective electron temperature with increasing argon pressure at 200 W and (b) calculated electron energy relaxation length in elastic range.

Image of FIG. 4.
FIG. 4.

The EEPF evolution with argon pressures at 200 W.

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/content/aip/journal/apl/96/4/10.1063/1.3291038
2010-01-28
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/4/10.1063/1.3291038
10.1063/1.3291038
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