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A smooth optical superlens
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View: Figures


Image of FIG. 1.
FIG. 1.

Schematic drawing of a smooth silver superlens with embedded 30 nm chrome gratings on a quartz window, operating at 380 nm wavelength. To prepare the smooth superlens, a thin germanium layer is seeded.

Image of FIG. 2.
FIG. 2.

Step by step surface characterization of the prepared smooth silver superlens sample with embedded gratings using AFM. (a) Close-up image of the nanoimprinted chrome gratings of 30 nm half-pitch prepared on quartz windows. Inset presents the line section plot at the marked dotted line. (b) Surface profile of the sample after planarization with 6 nm spacer layer onto chrome gratings, showing an RMS roughness of 1.3 nm. (c) Surface profile of the sample after the deposition of Cr window, Ge and Ag layer. (d) The image of the 30 nm half-pitch Cr grating area recorded on the photoresist layer after exposure and development. (Color scale for all images: 0 to 20 nm).

Image of FIG. 3.
FIG. 3.

(a) Computed image modulation with superlens (blue dashed curve) and without superlens (red dotted curve). (b) Subdiffraction optical imaging with superlens: AFM of developed photoresist with zoom in panel showing section analysis. (c) Fourier analysis of the developed image grating. (d) Near-field optical imaging without superlens.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A smooth optical superlens