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Bit patterned media based on block copolymer directed assembly with narrow magnetic switching field distribution
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10.1063/1.3293301
/content/aip/journal/apl/96/5/10.1063/1.3293301
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/5/10.1063/1.3293301
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

BPM array consisting of MLs deposited onto Si pillar substrates fabricated via e-beam directed assembly of block copolymer films. SEM micrographs of (a) the block copolymer film after selective removal of the PMMA cylinder cores, (b) Si pillars after Cr lift-off using the template in (a) and subsequent reactive ion etching, and (c) magnetic BPM after depositing a Co/Pd ML thin film onto the pillar structures (left: top view, right: section view at 85° angle). (d) Bright field TEM cross-sectional image through two consecutive rows of bits (into the image plane) that are 180° phase shifted with respect to each other.

Image of FIG. 2.
FIG. 2.

Microspot PMOKE hysteresis loops [(a) and (c)] and corresponding island reversal curves [(b) and (d)] [enlarged view of the dashed boxes in (a) and (c)] from BPM arrays fabricated via e-beam directed assembly of block copolymer films. (a) and (b) show results from a (38 nm pitch) array, while (c) and (d) were obtained from a (28 nm pitch) pattern. The insets display a high resolution MFM image of the array after demagnetization (top) and a SEM image of the array after media deposition (bottom), respectively.

Image of FIG. 3.
FIG. 3.

Normalized SFD vs density for BPM fabricated by e-beam alone (solid circles) and by directed assembly (open circles).

Image of FIG. 4.
FIG. 4.

SEM images of BPM at with various size distributions fabricated by (a) directed block copolymer assembly, , [(b) and (c)], undirected block copolymer assembly, and 19%, respectively, and (d) e-beam lithography alone . (e) PMOKE reversal curves of the same four patterns. (f) Normalized magnetic SFD vs pillar size distribution for the four samples. The line is a guide to the eye.

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/content/aip/journal/apl/96/5/10.1063/1.3293301
2010-02-05
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Bit patterned media based on block copolymer directed assembly with narrow magnetic switching field distribution
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/5/10.1063/1.3293301
10.1063/1.3293301
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