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/content/aip/journal/apl/96/5/10.1063/1.3309586
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/content/aip/journal/apl/96/5/10.1063/1.3309586
2010-02-03
2016-08-27

Abstract

This letter reports an acoustic resonator of high quality factors operating in liquid media. The film bulk acoustic resonator (FBAR) is made of a ring-shaped piezoelectricaluminum nitride thin film, and is excited in a contour mode. By having a low motional resistance upon coupling with liquids, the contour mode FBAR achieved up to 189, more than 12× over the state-of-the-art FBARs in liquids. The resonator was characterized by an aptamer—thrombin binding pair for a biosensor and showed a mass resolution of .

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