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Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits
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10.1063/1.3309703
/content/aip/journal/apl/96/7/10.1063/1.3309703
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/7/10.1063/1.3309703
/content/aip/journal/apl/96/7/10.1063/1.3309703
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/content/aip/journal/apl/96/7/10.1063/1.3309703
2010-02-17
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Reducing quantum-regime dielectric loss of silicon nitride for superconducting quantum circuits
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/7/10.1063/1.3309703
10.1063/1.3309703
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