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Schematics of the probe structure.
Delay algorithm process at 10 mTorr, 350 W (a) transmitted intensity spectrum, (b) group delay spectrum, (c) spectrum calculated from Eq. (1).
Dependence of rf power (150, 300, and 500 W) in a measurement of cutoff frequency with different methods at 300 mTorr.
A cutoff frequency clearly obtained from Eq. (1) at high power (300 mTorr, 500 W), (b) at high pressure (1 Torr, 400 W).
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