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Plasma density measurements by phase resolved cutoff
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10.1063/1.3332477
/content/aip/journal/apl/96/8/10.1063/1.3332477
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/8/10.1063/1.3332477
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematics of the probe structure.

Image of FIG. 2.
FIG. 2.

Delay algorithm process at 10 mTorr, 350 W (a) transmitted intensity spectrum, (b) group delay spectrum, (c) spectrum calculated from Eq. (1).

Image of FIG. 3.
FIG. 3.

Dependence of rf power (150, 300, and 500 W) in a measurement of cutoff frequency with different methods at 300 mTorr.

Image of FIG. 4.
FIG. 4.

A cutoff frequency clearly obtained from Eq. (1) at high power (300 mTorr, 500 W), (b) at high pressure (1 Torr, 400 W).

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/content/aip/journal/apl/96/8/10.1063/1.3332477
2010-02-25
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Plasma density measurements by phase resolved cutoff
http://aip.metastore.ingenta.com/content/aip/journal/apl/96/8/10.1063/1.3332477
10.1063/1.3332477
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