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Left: (a) and (b) are RD spectra of structures A and B, while (c) is of a Si(110) nonstressed substrate. Solid line superimposed with spectra (b) is of a Si(110) bar tensile strained mechanically along . Right: first-energy derivative of the RD spectra at transition. Solid lines are fits to the derivative spectra. Broadening energies and phase angles are as indicated. See text for details.
X-ray reciprocal space maps. [(a) and (b)] sample A and [(c) and (d)] sample B. The point around which [(a) and (c)] were measured was (331), while the intensities around the (260) reciprocal point are drawn in [(b) and (d)].
(a) Model of microtwin formation (black circles) and its surroundings (white circles). The upper part corresponds to the projection onto the (110) plane. (b) and (c) are micro-RD spectra measured at two individuals pixels for two different areas of the surface for each structure.
[(a) and (b)] Micro-RD maps of the samples A and B and their corresponding AFM images. The RMS roughness of the two samples was 9.8 and 68 nm, respectively.
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