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Titanium nitride films for ultrasensitive microresonator detectors
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10.1063/1.3480420
/content/aip/journal/apl/97/10/10.1063/1.3480420
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/10/10.1063/1.3480420
/content/aip/journal/apl/97/10/10.1063/1.3480420
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/content/aip/journal/apl/97/10/10.1063/1.3480420
2010-09-10
2014-11-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Titanium nitride films for ultrasensitive microresonator detectors
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/10/10.1063/1.3480420
10.1063/1.3480420
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