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energy-loss spectrum for 20 nm film. The inset is a magnified region of the energy loss spectrum.
XPS spectra of (a) core level and valence band of GaSb wafer, (b) core level and valence band of thick sample, and (c) and core levels of thin sample.
XPS spectra of core level of sample with various surface treatments applied prior to oxide deposition (a) and HCl and (b) .
(a) XPS spectra of and for sample with HCl surface treatment applied prior to oxide deposition and (b) The ratio of for the various surface treatments.
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