1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Tuning the permeability of permalloy films for on-chip inductor applications
Rent:
Rent this article for
USD
10.1063/1.3502478
/content/aip/journal/apl/97/16/10.1063/1.3502478
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/16/10.1063/1.3502478
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

MFM images of single layer permalloy (NiFe) films of different thickness: (a) 500 nm, (b) 300 nm, (c) 150 nm, (d) 100 nm, and (e) 50 nm. (f) 2D spectral density plot for different thicknesses of the single layer NiFe film.

Image of FIG. 2.
FIG. 2.

Hysteresis loops for (a) different thicknesses of single layer NiFe films and (b) -thick multilayer NiFe/Cr films with NiFe layers of varying thicknesses. (c) Permeability plot of -thick multilayer NiFe/Cr films with varying NiFe layer thickness. (d) Cross-section scanning electron microscope image of a film.

Image of FIG. 3.
FIG. 3.

MFM images of multilayer NiFe/Cr films: (a) , (b) , and (c) .

Image of FIG. 4.
FIG. 4.

Optical images of the fabricated inductors: (a) with a bare spiral coil without NiFe rings and (b) with NiFe/Cr rings connected through magnetic bias. (c) Measured inductance values for bare inductor and inductors with multilayer NiFe rings having different permeabilities. (d) Resistivity plot for NiFe/Cr multilayer films with different thicknesses of NiFe layer.

Loading

Article metrics loading...

/content/aip/journal/apl/97/16/10.1063/1.3502478
2010-10-21
2014-04-19
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Tuning the permeability of permalloy films for on-chip inductor applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/16/10.1063/1.3502478
10.1063/1.3502478
SEARCH_EXPAND_ITEM