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MFM images of single layer permalloy (NiFe) films of different thickness: (a) 500 nm, (b) 300 nm, (c) 150 nm, (d) 100 nm, and (e) 50 nm. (f) 2D spectral density plot for different thicknesses of the single layer NiFe film.
Hysteresis loops for (a) different thicknesses of single layer NiFe films and (b) -thick multilayer NiFe/Cr films with NiFe layers of varying thicknesses. (c) Permeability plot of -thick multilayer NiFe/Cr films with varying NiFe layer thickness. (d) Cross-section scanning electron microscope image of a film.
MFM images of multilayer NiFe/Cr films: (a) , (b) , and (c) .
Optical images of the fabricated inductors: (a) with a bare spiral coil without NiFe rings and (b) with NiFe/Cr rings connected through magnetic bias. (c) Measured inductance values for bare inductor and inductors with multilayer NiFe rings having different permeabilities. (d) Resistivity plot for NiFe/Cr multilayer films with different thicknesses of NiFe layer.
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