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(a) FEM simulated electric field of the fundamental symmetric and antisymmetric zipper cavity modes. (b) Schematic of the zipper cavity. The designed cavity structure has an interbeam gap , beam width , lattice constant , hole height , and hole width . (c) FEM simulated fundamental in-plane mechanical mode (, , ). (d) SEM micrograph of fabricated zipper cavity with positive (top) and ground (bottom) MEMS electrodes. (e) Top view of the end-mirror section and (f) angled view of the central cavity region of the zipper cavity.
(a) Micro-PL setup with static (dc) and modulation (ac) actuation circuits. (b) SEM micrograph of a wire-bonded device array. In order to test a larger number of devices simultaneously, an array of 80 zipper cavity lasers are connected in parallel to a common pair of contacts.
(a) Subthreshold spectrum of the optically pumped zipper cavity laser under no applied capacitor voltage (bottom curve) and a small applied capacitor voltage (top curve). (b) Light-in vs light-out (LL) curve for the fundamental symmetric (○) and antisymmetric (◻) zipper cavity modes. The peak absorbed pump power is estimated from the pump duty cycle (1.1%), the fraction of the pump beam intercepted by the zipper cavity (19%), and the material absorption (10%). (c) PL spectrum below (bottom curve), at (middle curve), and above (top curve) threshold corresponding to the filled circle data points in the LL curve of (b).
(a) PL spectra of symmetric laser mode as a function of the applied voltage amplitude squared [Inset (b): corresponding (1, −) antisymmetric mode tuning]. A fit to the tuning curve based upon numerical FEM simulations of the laser cavity is shown as a dot-dashed white line. (c) PL spectra of the zipper cavity laser mode vs MEMS drive frequency. Zoom in of the (d) third-order and (e) first-order in-plane mechanical resonances.
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