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Top-view SEM micrographs of the AlN nanorods at deposition times of (a) 5 min and (b) 10 min. Typical distributions of (c) basal diameters and (d) lengths of the AlN nanorods deposited in a 5 min-long process.
A typical HRTEM image of an AlN nanorod synthesized in (a) a 10 min-long process and (b) the corresponding SAED pattern.
Typical narrow-scan XPS spectra of the (a) Al and (b) N for the sample deposited in a 10 min-long process.
Mechanism of catalyst-free, plasma-enabled growth of AlN nanorods.
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