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Results of Ca-testing at RH of barrier films grown on PET by ALD at 50, 75, and corresponding to 75, 125, and 250 ALD cycles at each growth temperature. The corresponding thickness can be calculated from the individual ALD deposition rates: 0.926 Å/cycle , 0.86 Å/cycle , and 0.85 Å/cycle .
WVTR measured with commercial instrument at RH for barrier films grown on PET by ALD at 50, 75, and vs the thickness. The horizontal dotted line corresponds to the published instrument measurement limit of 0.5 mg .
Plot of calculated [Eq. (1)] critical defect density in ALD films vs the corresponding threshold thickness for the onset of permeation. Points correspond to the measured H-defect concentrations plotted vs threshold thick, determined from direct WVTR measurement on ALD films grown at 50 and .
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