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Permeation measurements and modeling of highly defective thin films grown by atomic layer deposition on polymers
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10.1063/1.3519476
/content/aip/journal/apl/97/22/10.1063/1.3519476
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/22/10.1063/1.3519476
/content/aip/journal/apl/97/22/10.1063/1.3519476
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/content/aip/journal/apl/97/22/10.1063/1.3519476
2010-11-29
2014-07-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Permeation measurements and modeling of highly defective Al2O3 thin films grown by atomic layer deposition on polymers
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/22/10.1063/1.3519476
10.1063/1.3519476
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