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Basic principle of the cantilever reader, based on a holographic common-path interferometer. cavity surface emitting laser, (focal ), splitter, optical element (double focusing element with focal ), , and detector. The S rays represent secondary beams that are not used for detection.
Recording beams O and R used for the HOE based on the desired reconstruction beams C and I.
Intensity profiles of the two focused beams generated by the holographic optical element.
(a). Schematic of a piezo-based test rig for generating a controlled deflection of a cantilever at nanoscale. (b). Photograph of realized test rig; the inset shows a magnified picture of the two laser spots illuminating one of the cantilevers.
Detector signal vs time as a result of a periodic deflection of the cantilever by ±2 nm.
Schematic illustration of a holographic array reader. Here the transmitter system L1-HOE double-images an array of five VCSELs at an array of five cantilevers (for simplicity, only reading beams 1 are shown in full) after which the receiver system HOE-BS-L2 combines the reflected beams from the cantilevers at a corresponding photodetector array. The imaging properties of the two systems inhibit cross-talk.
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