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CTLM test structure. (a) Optical image of CTLM structure, (b) close-up SEM image of CTLM structure, and (c) schematic side-view and four-point probe testing setup.
Contact resistance vs temperature for Pt/SiC and Pt/NGC/SiC contacts. Inset: representative I-V curve on Pt/SiC contact at room temperature with CTLM.
AES and Raman (excitation wavelength of 632.8 nm) spectra (inset) of (a) as-deposited SiC and (b) after annealing at in ultrahigh vacuum.
XRD spectra of (a) Pt/SiC contact, (b) Pt/NGC/SiC contact (both after testing in the air), and (c) SiC film with surface carbon layer.
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