1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Real-time observation of anisotropic strain relaxation by three-dimensional reciprocal space mapping during InGaAs/GaAs (001) growth
Rent:
Rent this article for
USD
10.1063/1.3458695
/content/aip/journal/apl/97/4/10.1063/1.3458695
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/4/10.1063/1.3458695
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Point 022 in reciprocal space and (b) 3D-RSM constructed by a series of CCD images indicated by blue planes.

Image of FIG. 2.
FIG. 2.

Typical 3D-RSM images of grown InGaAs films with thicknesses of 145 nm (upper images) and 305 nm (lower images). Images on the left show a bird’s eye view of the 3D-RSM. Images at the center and on the right are projected images of the 3D-RSM viewed along and directions, respectively.

Image of FIG. 3.
FIG. 3.

Evolution of the inverse of InGaAs lattice constants along [110], , and [001] (, , and ) and peak width along [110] and ( and ) as a function of film thickness.

Loading

Article metrics loading...

/content/aip/journal/apl/97/4/10.1063/1.3458695
2010-07-28
2014-04-20
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Real-time observation of anisotropic strain relaxation by three-dimensional reciprocal space mapping during InGaAs/GaAs (001) growth
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/4/10.1063/1.3458695
10.1063/1.3458695
SEARCH_EXPAND_ITEM