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Femtosecond laser fabrication of high reflectivity micromirrors
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10.1063/1.3467846
/content/aip/journal/apl/97/4/10.1063/1.3467846
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/4/10.1063/1.3467846
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Main steps involved in the fabrication of microresonators. (a) Cross-section of the structure showing laser-assisted etching of the remaining Si after laser ablation. (b) Patterning of the microresonators by ablation of the free standing membrane using a line focus with a cylindrical lens (ablated regions in black).

Image of FIG. 2.
FIG. 2.

Optical micrographs of the microresonators. (a) Front view; (b) image taken from the rear side of the sample showing singly (s) clamped and doubly (d) clamped microresonators coated with 200 nm Co.

Image of FIG. 3.
FIG. 3.

Cryogenic (20 K) frequency response of a doubly clamped Co coated microresonator driven with wide-band white noise from a high frequency piezo disk in vacuum. The inset displays the free ringdown of the fundamental mode as used for quality factor determination.

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/content/aip/journal/apl/97/4/10.1063/1.3467846
2010-07-26
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Femtosecond laser fabrication of high reflectivity micromirrors
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/4/10.1063/1.3467846
10.1063/1.3467846
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